SOLVER Scanning Probe Microscope

General information
Main technical specification
The main features and possibilities of software
Results obtained on Solver-P7LS

Measurement, imaging and problem solving for CD and DVD discs using Solver-LS Scanning Probe Microscope.

Solver-LS AFMs with their ResonantMode possibilites are currently being used as effective failure analysis tools in sorting out of quality and yield issues during the production of compact digital disks. CDs and DVDs fail for several reasons such as improper pit profile and shape, which affects whether the bits will release or tear off when stamped and the playability of discs; improper surface roughness of the stampers, which affects releasability during the molding process. Spacing, pit dimension, track width and pitch also affect playability. Solver-LS AFM can non-destructively and easily measure all these parameters.

Solver-LS AFM provides CD and DVD discs manufacturers with the improved methods to analyze the quality of the stamper and disc surfaces. AFMs produced by NT-MDT are perfectly suited to the investigation of bump and pit characteristics in DVD and CD manufacturing. One of the major advantages of AFM mode over other techniques is that AFM provides quantitative, three-dimensional imaging of the disc or stamper surface within minutes. And once an AFM image is captured, cross-sections can be obtained in seconds to provide pit depth, pit width, pit side-wall angle, and track pitch anywhere in the data set - and without physically damaging the disc. The discs may be examined before metallization and after molding for pit characterization with Solver AFM. The following types of measurements can be provided for CD and DVD inspection using Solver-LS AFM:

  • For tracks: Pitch;
  • For bumps (stamper): Height, Width, Left/right sidewall angle, Roughness of bump surface;
  • For pits (disc): Depth, Width, Left/right sidewall angle, Roughness of pit floor;

The following of Disc Problems can be analyzed with Solver-LS AFM:

  • Track Pitch Variations
  • Pit Depth Monitoring
  • High Error Rate at Beginning of Play
  • Pit Morphology and Block Error Rate (BLER)
Using ResonantMode, Solver-LS series Scanning Probe Microscopes are perfectly suited for rapid and effective problem solving for CD and DVD discs.

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Scan size: X:10.5um, Y:8.4um, Z:0.25um
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The improper pit profile and shape can be easily viewed on the screen

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The roughness of stamper surface is highly important information for CD product process.

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Scan size: X:2.4um, Y:2.1um, Z:0.2um



The whole surface of wafer can be previewed through optical system to determine the defect area.
The located stamper area with defects is scanned to visualise and determine the cause of these defects.

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Scan size: X:6.0um, Y:7.0um

SFM image of CD Al cover of Replicated disk.

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The parameters of cross-section can be measured in the oscilloscope window of the control program.


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