Ultrasharp Silicon Cantilever Tests
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Digital Instruments (Nanoscope 3)
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Conductive cantilevers
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Lithography with conductive cantilevers
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Digital Instruments (Nanoscope 3)
SFM
contact mode
18-Sep-1996
9.9x9.9 um
SFM
contact mode
18-Sep-1996
9.9x9.9 um
Proding with Ultrasharp conductive cantilevers
185x185 nm
375x130 nm
SFM
contact mode
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22-May-1997
Lithography with UltraSharp conductive cantilevers
SFM
contact mode
25-May-1997
0.9x0.9 um
Copyright © 1996, NT-MDT
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