NT-MDT SC11 and SC21 series Ultrasharp Silicon Cantilevers


		Main page of Ultrasharp Silicon Cantilevers The package Ultrasharp Silicon Cantilevers Ultrasharp Silicon Cantilever Tests SC12 series with straight springs

SC11 and SC21 series of Ultrasharp silicon cantilevers with triangular springs

Ultrasharp silicon cantilevers of SC11 and SC21 series have the same design. Each chip includes the triangular spring and the small one. The main specialty of triangular springs is low

sensibility to lateral forces. Ultrasharp silicon cantilevers of SC11 and SC21 series are intended for probing of widest sample range with highest resolution.

SEM images of UltraSharp silicon cantilever tip (SC11 series)

[Cantilevers chip (0.45 mm thick) includes 2 springs]

SC11 and SC21 series of Ultrasharp silicon cantilevers specifications

Canti- lever type	Cantilever length, l, um	Cantilever width, w, um	* Cantilever thickness, um			* Resonant frequency, kHz			* Force constant, N/m
Canti- lever type	Cantilever length, l, um	Cantilever width, w, um	min	typical	max	min	typical	max	min	typical	max
A	200	40	0.9	1.0	1.1	16	20	24	0.25	0.35	0.50
B	90	60	0.9	1.0	1.1	140	180	220	4.5	6.0	8.0
A	200	40	1.9	2.0	2.1	32	40	48	2.5	3.0	3.5
B	90	60	1.9	2.0	2.1	300	360	420	41	48	55
A	290	40	0.9	1.0	1.1	7	10	13	0.09	0.12	0.16
B	110	40	0.9	1.0	1.1	80	110	140	1.5	2.0	3.0
A	290	40	1.9	2.0	2.1	16	20	24	0.8	0.9	1.1
B	110	40	1.9	2.0	2.1	180	260	280	15	17	20

A supplementary specifications sheet detailing the exact values of the labeled * parameters to each UltraSharp silicon cantilevers package

Ultrasharp silicon cantilevers with special coatings

We offer special types of cantilevers with conductive and wear-resistance coatings.

CONDUCTIVE Ultrasharp silicon cantilevers with hard conductive coatings are intended for: STM, nano-spreading resistance profiling; electric field mapping; Kelvin probe microscopy and Scanning Capacitance Microscopy. Conductive coatings provide:
       - high mechanical stability;
       - good ohmic contact to sample surface;
       - minimum oxidation of tip surface;
       - high chemical stability

We offer some different materials for this coating. The conductive coatings of W₂C, TiN, TiO, W, Cr are available for you at the moment. The typical value of conductive coating thickness is

about 10-20 nm. The resistivity is from 5 to 50 uOm�cm for different coatings. The curvature radius of tip with such conductive coating is less than 30 nm. We can form any thickness of conductive coating in accordance with your requirements.

In addition we offer special type of CONTACT Ultrasharp silicon cantilevers coated with highly mechanically and chemically stable Si₃N₄ film. The Si₃N₄ film is a high quality dielectric coating formed by CVD process. These cantilevers are more useful for long-term, durable contact measurements. The typical value of Si₃N₄ coating thickness is about 10 nm.

If you have any special demands or wishes please contact us. We will be glad to design and produce cantilevers for you.

� Scans obtained with Conductive tips

If you have any specific wishes or demands,
PLEASE CONTACT US: usharp@ntmdt.zgrad.ru